Si Semiconductor
Semiconductors are essential components of modern electronics and serve as a critical foundation for technologies such as AI, smartphones, and autonomous driving that support both industry and everyday life. Produced with our proprietary manufacturing and refining technologies, our ultra-high-purity silicon (Si) semiconductor materials support the world’s most advanced miniaturization processes from the ground up.
Interlayer Dielectric
| High-K (High Dielectric Constant Film) | AlCl3 TMA HOC TEMAH TEMAZr La(iPrCp)3 |
|---|---|
| Ferroelectric | TDMAH TTIP ZTB |
| Oxide Film | 3DMAS |
| Electrode | TEA PT10 TaCl5 TiCl4 |
| Low-k (Low Dielectric Constant Film) |
DMDMOS Alkyl silicon compound |
Interconnect
| Seed Layer | Al-CDV | DMAH DMEAA |
|---|---|---|
| Mo-CDV | MoCl5 MoCl6 |
|
| W-CDV | BTBMW | |
| Barrier Metal | Co compound | CCTBA |
| Ni compound | AllylCpNi Ni(MeCp)2 Ni(PF3)4 |
|
| Ru compound | Ru(EtCp)2 | |
| TaN-CVD | PDMAT TaCl5 |
|
| TiN-CDV | TiCl4 TDMAT TDEAT |
Etching materials
| For Poly-Si/Amorphous Si | HBr HF SiCl4 |
|---|---|
| For wiring | BCl3 BBr3 Br2 |
Ion implantation
| B compound | BF3, 11BF3 |
|---|---|
| Ge compound | GeF4 |
| In compound | InI, InCl3, InF3 |
| P compound | PF3 |
| Sb compound | Please contact us. |
Cleaning
| Gas | HF |
|---|---|
| Cleaning solvent | Octane, Hexane, Ethylcyclohexane etc. |
Product and Service Inquiries, Quote Requests
Please use the link below for requests for quotes or inquiries regarding our products and services.