List of Products

No. metal Product name Product name (English) CAS No. Vapor pressure Structural formula
1 Al TIBAl Triisobutylaluminum 100-99-2 0.0256 mmHg (25 ℃)
2 Al AlCl3 Aluminum trichloride 7446-70-0 1 mmHg (100 ℃)
3 Al DMAH Dimethylaluminum hydride 865-37-2 N/A
4 Al DMEAA Dimethylethylaminealane 124330-23-0 N/A
5 Al TEA Triethylaluminum 97-93-8 4 Pa (20 ℃)
6 Al TMA Trimethylaluminum 75-24-1 N/A
7 B B(CH3)3 Trimethylboron 593-90-8 N/A
8 B B(C2H5)3 Triethylboron 97-94-9 12.4 Torr (0 ℃)
50.2 Torr (25 ℃)
※Calculated value
9 B BBr3 Boron tribromide 10294-33-4 5.3 kPa (14 ℃）
10 B BCl3 Boron trichloride 10294-34-5 166 kPa
(1250 mmHg) (27 ℃)
11 B BF3 Boron trifluoride 7637-07-2 133 Pa (-145.6 ℃）
12 Br Br2 Bromine 7726-95-6 23.3 kPa (20 ℃)
13 Br HBr Hydrogen bromide 10035-10-6 2445 kPa (20 ℃）
14 C CH3OH Methanol 67-56-1 12.3 kPa (20 ℃）
15 C n-Octane n-Octane 111-65-9 1879 Pa (14.1 mmHg (25 ℃))
16 C Ethylcyclohexane Ethylcyclohexane 1678-91-7 12.8 mmHg (25 ℃)
17 C n-Hexane n-Hexane 110-54-3 16 kPa (20 ℃）
18 Co CCTBA (3,3-Dimethyl-1-butyne)dicobalt hexacarbonyl 56792-69-9 0.1 torr (45 ℃)
19 Er Er(EtCp)3 Tris(ethylcyclopentadienyl)
erbium		 404009-19-4 N/A
20 F HF Hydrogen fluoride 7664-39-3 122 kPa (25 ℃）
276.0 kPa (50 ℃）
21 Fe Fe(C5H5)2 Bis(cyclopentadienyl)iron 102-54-5 6.6 Pa (40 ℃)
22 Ga Ga(CH3)3 Trimethylgallium 1445-79-0 N/A
23 Ge GaCl3 Galliumtrichloride 13450-90-3 N/A
24 Ge GeCl4 Germanium tetrachloride 10038-98-9 N/A
25 Ge GeF4 Germanium tetrafluoride 7783-58-6 1.0 MPa (14.5 ℃)
26 Hf HOC HOC — N/A —
27 Hf TDMAH Tetrakis(dimethylamino)
hafnium		 19782-68-4
(19962-11-9)		 N/A
28 In InCl3 Indium trichloride 10025-82-8 N/A
29 In InF3 Indium trifluoride 7783-52-0 N/A
30 In InI Indium iodide 13966-94-4 N/A
31 In TEI Triethylindium 923-34-2 N/A
32 La La(iPrCp)3 Tris
(isopropylcyclopentadienyl)
lanthanum		 68959-87-5 N/A
33 Mg Mg(C5H5)2 Bis(cyclopentadienyl)
magnesium		 1284-72-6 N/A
34 Mo MoCl5 Molybdenum pentachloride 10241-05-1 1.75 mmHg (25 ℃)
35 Mo MoCl6 Molybdenum hexachloride 13706-19-9 N/A
36 N (CH3)2N(NH2) 1,1-Dimethylhydrazine 57-14-7 13.7 kPa（20 ℃）
37 Ni AllylCpNi Allylcyclopentadienylnickel 12107-46-9 60.0 Pa (20 ℃）※Calculated value
38 Ni Ni(MeCp)2 Bis(methylcyclopentadienyl)
nickel		 1293-95-4 N/A
39 Ni Ni(PF3)4 Tetrakis(trifluorophosphine)
nickel		 13859-65-9 N/A
40 P (t-Bu)PH2 t-Butylphosphine 2501-94-2 N/A
41 P PCl3 Phosphorus trichloride 7719-12-2 13.3 kPa (21 ℃)
42 P PF3 Phosphorus trifluoride 7783-55-3 N/A
43 Pt PT10 Trimethyl
(methylcyclopentadienyl)
platinum		 94442-22-5 N/A
44 Ru Ru(EtCp)2 Bis(ethylcyclopentadienyl)
ruthenium		 32992-96-4 0.106 MPa (at-100.7 ℃)
45 Sb TMSb Trimethylantimony 594-10-5 N/A
46 Se Se(CH3)2 Dimethylselenide 593-79-3 N/A
47 Si 3DMAS Tris(dimethylamino)silane 15112-89-7 N/A
48 Si Aurora®2.7 Aurora®2.7 — N/A —
49 Si SiCl4 Silicon tetrachloride 10026-04-7 25.7 kPa (20 ℃）
50 Si SiH3CH3 Methylsilane 992-94-9 13.04 bar (20 ℃)
51 Si MTCS Methyltrichlorosilane 75-79-6 17.9 kPa (20 ℃)
52 Ta PDMAT Pentakis(dimethylamino)
tantalum		 19824-59-0 N/A
53 Ta TaCl5 Tantalum pentachloride 7721-01-9 N/A
54 Ti TDEAT Tetrakis(diethylamino)
titanium		 4419-47-0 N/A
55 Ti TDMAT Tetrakis(dimethylamino)
titanium		 3275-24-9 0.5 mmHg (50 ℃)
56 Ti TiCl4 Titanium tetrachloride 7550-45-0 1.3 kPa (25 ℃）
57 Ti TTIP Tetra-i-propoxytitanium 546-68-9 0.133 kPa (58 ℃)
1.33 kPa (116 ℃)
13.3 kPa (175 ℃)
58 W BTBMW Bis(t-butylimino)bis
(dimethylamino)tungsten		 406462-43-9 N/A
59 Zn Zn(C2H5)2 Diethylzinc 557-20-0 N/A
60 Zn Zn(CH3)2 Dimethylzinc 544-97-8 N/A
61 Zr TEMAZr Tetrakis(ethylmethylamino)
zirconium		 175923-04-3 N/A
62 Zr Zr(C11H19O2)4 Tetrakis(dipivaloylmethanato) zirconium 18865-74-2 N/A
63 Zr ZTB Tetra-t-butoxyzirconium 2081-12-1 N/A

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